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Matthew Goeckner

E-mail: [email protected]
Phone: 972-883-4292

800 West Campbell Rd
Mailstop: EC-38
Richardson, TX 75080-3021








Matthew Goeckner

Professor of Mechanical Engineering

PhD, Plasma Physics, University of Iowa, 1990.
MS, Physics, University of California – Los Angeles, 1984.
BS, Physics, Southern Illinois University at Carbondale, 1983.
BS, Mathematics, Southern Illinois University at Carbondale, 1982.

Research Interests
Plasma-materials interactions, Plasma science, material growth kinetics.

Five Most Recent Journal Publications, Book Chapters, and Books

  • S. P. Sant, C. T. Nelson, L. J. Overzet and M. J. Goeckner
    Relationship Between Gas-Phase Chemistries And Surface Processes In Fluorocarbon Etch Plasmas:
    A Process Rate Model.
    Journal of Vacuum Science and Technology A 27, 631-642 (2009).
  • G. Padron-Wells, Brandon.C. Jarvis, A.K. Jindal and M.J Goeckner
    Understanding the Synthesis of DEGVE Pulsed Plasmas for application to ultra thin biocompatible interfaces.
    Colloids and Surfaces B: Biointerfaces 68, 163-170 (2009)
  • D. Ogawa, I. Saraf, A. Sra, R. Timmons, M. Goeckner and L. Overzet
    The direct injection of liquid droplets into low pressure plasmas,
    J Vac Sci. Technol. A 27, 342 2009
  • R. G. Pierce, G. Padron-Wells, and M. J. Goeckner,
    Gas-phase chemistry of pulsed n-hexane discharge
    Plasma Chemistry and Plasma Processing 29, 1-11 (2009)
  • P.L.S. Thamban, J. Hosch, and M. J. Goeckner
    Controllable optical emission spectroscopy diagnostic system for analysis of process chemistries
    Review Of Scientific Instruments 81, 013502 (2010).

Major Honors and Awards

  • Chair, Plasma Science and Technology Division, American Vacuum Society, 2010-11
  • Erik Jonnson School of Engineering and Computer Science Outstanding Service Award, 2007
  • Visiting Professor, Sungkyunkwan University, Suwon, South Korea, 2006
  • Student Prize - AVS, Plasma Science and Technology Division, 1988
  • Membership Physics Honor Society (Sigma Pi Sigma), 1982
  • William C. Ballowe Sr. Award (Top senior in physics), 1982
  • Membership Mathematics Honor Society (Pi Mu Epsilon), 1982